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Electronic grade trimethyl aluminum (TMA)


Colorless transparent liquid, melting point 15 ℃, boiling point 127 ℃, density 0.752 g/mL. In the air, it can instantly ignite and spontaneously ignite, and react violently with alcohol, acid and water with active hydrogen. It is miscible with aliphatic hydrocarbons such as hexane and heptane and aromatic hydrocarbons such as toluene and xylene in an arbitrary ratio.

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Borophosphosilicate glass material


BPSG material is organic phosphorus, boron compounds, including: TMB/TMP/TMPO/TEB/TEPO properties: are colorless pungent odor liquid. Application: Used for mixing with TEOS in wafer fabrication, deposited by CVD process: PSG (phosphorus glass) and BPSG (borophosphosilicate glass).

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