Electronic grade trimethyl aluminum (TMA)
Colorless transparent liquid, melting point 15 ℃, boiling point 127 ℃, density 0.752 g/mL. In the air, it can instantly ignite and spontaneously ignite, and react violently with alcohol, acid and water with active hydrogen. It is miscible with aliphatic hydrocarbons such as hexane and heptane and aromatic hydrocarbons such as toluene and xylene in an arbitrary ratio.
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Details Introduction
1. molecular formula：Al(CH3)3
2. molecular weight：72.09
3. physical and chemical properties:
Colorless transparent liquid, melting point 15 ℃, boiling point 127 ℃, density 0.752 g/mL. In the air, it can instantly ignite and spontaneously ignite, and react violently with alcohol, acid and water with active hydrogen. It is miscible with aliphatic hydrocarbons such as hexane and heptane and aromatic hydrocarbons such as toluene and xylene in an arbitrary ratio.
4. uses:
For PECVD or ALD deposition of Al in the photovoltaic field2O3Passivation film; in semiconductor manufacturing, used to deposit thin films of High-k materials, such as Al.2O3At the same time, TMA is also an important source of organic metals in the manufacture of aluminum-containing semiconductors (such as AlAs, AlN, AlP, AlSb, AlGaAs, AlInGaAs, AlInGaP, AlGaN, AlInGaN, AlInGaNP, etc.) by organic metal chemical vapor deposition (MOCVD).
5. quality indicators:
Analysis Project | Technical indicators | Analysis Project | Technical indicators | ||
5N | 6N | 5N | 6N | ||
Ag，max | 0.4 ppm | 10 ppb | Li，max | 0.1 ppm | 5 ppb |
As，max | 0.5 ppm | 10 ppb | Mg，max | 0.05 ppm | 10 ppb |
Boron (B),max | 0.4 ppm | 10 ppb | Mn，max | 0.05 ppm | 10 ppb |
Ba，max | 0.1 ppm | 10 ppb | Na，max | 0.5 ppm | 20 ppb |
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0.2 ppm | 5 ppb | Ni，max | 0.4 ppm | 20 ppb | |
Bi，max | 0.2 ppm | 5 ppb | Pb，max | 1 ppm | 10 ppb |
Ca，max | 0.1 ppm | 10 ppb | Se，max | 1 ppm | 10 ppb |
Cd，max | 0.1 ppm | 10 ppb | Si，max | 1 ppm | 20 ppb |
Co，max | 0.1 ppm | 10 ppb | Sn，max | 0.1 ppm | 10 ppb |
Cr，max | 0.1 ppm | 20 ppb | (Te),max | 0.1 ppm | 10 ppb |
Cu，max | 0.15 ppm | 20 ppb | Ti，max | 0.1 ppm | 50 ppb |
Fe，max | 0.1 ppm | 50 ppb | Vanadium (V),max | 0.2 ppm | 50 ppb |
Ga，max | 0.2 ppm | 50 ppb | Zn，max | 0.2 ppm | 50 ppb |
Ge，max | 0.1 ppm | 50 ppb | Zr，max | 0.2 ppm | 50 ppb |
Hg，max | 0.1 ppm | 10 ppb | Validity Period | 36 months | 36 months |
Potassium (K),max | 1 ppm | 10 ppb | / | ||
6. packing:
Jar: material: stainless steel 316L, electrolytic polishing tank. Valve Type: 1/4 inch diaphragm valve.
Valve: Body Material: Stainless Steel 316L. Connection size: 1/4 inch VCR.
Specifications: 14.2kg, 72kg, 300kgWait
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Guizhou Wylton Jinglin Electronic Material Co., Ltd.
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Business contact:0851-84350785
Guiyang Factory:0851-84350785
Chuzhou Factory:0550-5186766
Shanghai sales office:021-62275683
E-mail:jinglin@wylton.com
Address: New Material Industrial Park, Baiyun North Road, Baiyun District, Guiyang City, Guizhou Province
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