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Borophosphosilicate glass material

BPSG material is organic phosphorus, boron compounds, including: TMB/TMP/TMPO/TEB/TEPO properties: are colorless pungent odor liquid. Application: Used for mixing with TEOS in wafer fabrication, deposited by CVD process: PSG (phosphorus glass) and BPSG (borophosphosilicate glass).


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Details Introduction

 

BPSG materials are organic phosphorus and boron compounds, including:

TMB/TMP/TMPO/TEB/TEPO

Properties: are colorless liquid with pungent odor.

Application: Used for mixing with TEOS in wafer fabrication, deposited by CVD process: PSG (phosphorus glass) and BPSG (borophosphosilicate glass)

 

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