Electronic grade trimethyl phosphite (TMP)
It is mainly used as a phosphorus source for the deposition of phosphosilicate glass (PSG) and borophosphosilicate glass (BPSG) during wafer fabrication. It is an important electronic chemical required for the manufacture of semiconductors and microelectromechanical systems (MEMS).
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Details Introduction
1. molecular formula:P(OCH3)3
2. molecular weight:124.08
3. physical and chemical properties
Colorless liquid, with pungent odor, melting point -78 ℃, boiling point 111~112 ℃, density 1.05 g/mL. Flammable, insoluble in water. Water slowly decomposed into phosphoric acid and methanol.
4. uses
It is mainly used as a phosphorus source for the deposition of phosphosilicate glass (PSG) and borophosphosilicate glass (BPSG) during wafer fabrication. It is an important electronic chemical required for the manufacture of semiconductors and microelectromechanical systems (MEMS).
5. quality indicators
Analysis Project | Technical indicators | Technical indicators |
8.5N | 9N | |
Purity, min | 99.9999995% | 99.9999999% |
B ，max | 50 ppb | 50 ppb |
Cl-，max | 50 ppb | 50 ppb |
Moisture, max | 25 ppm | 25 ppm |
Number of particles ≥ 0.2 µm,max | 10 p/ml | 10 p/ml |
Number of particles ≥ 0.3 µm,max | 7 p/ml | 7 p/ml |
Number of particles ≥ 0.5 µm,max | 5 p/ml | 5 p/ml |
Number of particles ≥ 1.0 µm,max | 1 p/ml | 1 p/ml |
Main content, min | 99.99% | 99.99% |
Chroma, max | 5APHA | 5APHA |
6. packaging
Container: Stainless steel bottle
Outer packing: stainless steel cabinet
Specifications: 1.5L, 2 gallons, 5 gallons (19L), 10 gallons.
Intention Consultation
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Guizhou Wylton Jinglin Electronic Material Co., Ltd.
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Business contact:0851-84350785
Guiyang Factory:0851-84350785
Chuzhou Factory:0550-5186766
Shanghai sales office:021-62275683
E-mail:jinglin@wylton.com
Address: New Material Industrial Park, Baiyun North Road, Baiyun District, Guiyang City, Guizhou Province
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