Electronic grade phosphorus oxychloride
Colorless transparent volatile liquid with strong pungent odor. It is easy to hydrolyze in humid air to generate phosphoric acid and hydrochloric acid. The melting point is 1.25°C, the boiling point is 105.1°C, and the density is 1.675 g/mL. Evaporation heat 33.7kJ/mol.
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Details Introduction
1. molecular formula：POCl3
2. molecular weight:153.33
3. physical and chemical properties
Colorless transparent volatile liquid with strong pungent odor. It is easy to hydrolyze in humid air to generate phosphoric acid and hydrochloric acid. The melting point is 1.25°C, the boiling point is 105.1°C, and the density is 1.675 g/mL. Evaporation heat 33.7kJ/mol. Close to 300 ℃, still very stable. Explosions occur when large amounts of water are encountered. Toxic and corrosive.
4. uses
It is mainly used for the N-type doping of chips. It is a liquid phosphorus source for the production of integrated circuits, solar cells, optical fiber preforms, separation devices, etc. It is a necessary electronic chemical in the chip process. At the same time, electronic grade phosphorus oxychloride is also a raw material for the production of high-purity phosphate.
5.quality indicators
Analysis Project | Technical indicators | Analysis Project | Technical indicators | ||
6N | 7N | 6N | 7N | ||
Al，max | 40 ppb | 5 ppb | Li,max | 10 ppb | 6 ppb |
As，max | 30 ppb | 6 ppb | Mg，max | 20 ppb | 5 ppb |
Ag，max | 1 ppb | 1 ppb | Mn，max | 30 ppb | 1 ppb |
Ow, max. | 1 ppb | 1 ppb | Na,max | 10 ppb | 5 ppb |
Ba，max | 20 ppb | 1 ppb | Nb, max | 2 ppb | 1 ppb |
Bi，max | 10 ppb | 1 ppb | No,max | 20 ppb | 1 ppb |
Ca，max | 30 ppb | 5 ppb | Pb，max | 10 ppb | 3 ppb |
Co，max | 20 ppb | 1 ppb | Sn，max | 5 ppb | 1 ppb |
With,max | 20 ppb | 2 ppb | Sr，max | 5 ppb | 1 ppb |
Cr，max | 20 ppb | 1 ppb | Ti,max | 5 ppb | 2 ppb |
Fe，max | 40 ppb | 5 ppb | Zn，max | 5 ppb | 1 ppb |
Ga,max | 1 ppb | 1 ppb | Main content, min | 99.9% | 99.9% |
Hg，max | 10 ppb | 5 ppb | Chroma, max | 5APHA | 5APHA |
K，max | 30 ppb | 3 ppb | Number of particles ≥ 0.3Μm，max | 50p/ml | 50p/ml |
6. packaging
Container: high purity quartz bubbler, coated high purity quartz source bottle
Outer packing: container coat thick PVC plastic bag; PE special box built-in sponge cushion
Specifications: 500ml, 1000ml, 1500ml,4.5L,5L can also be packaged according to customer requirements
Intention Consultation
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Guizhou Wylton Jinglin Electronic Material Co., Ltd.
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Business contact:0851-84350785
Guiyang Factory:0851-84350785
Chuzhou Factory:0550-5186766
Shanghai sales office:021-62275683
E-mail:jinglin@wylton.com
Address: New Material Industrial Park, Baiyun North Road, Baiyun District, Guiyang City, Guizhou Province
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