Electronic grade trimethyl aluminum (TMA)
Colorless transparent liquid, melting point 15C, boiling point 127C, density 0.74 g/ml. in the emptyThe gas can instantly ignite and spontaneously ignite, and react violently with alcohol, acid and water with active hydrogen.
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Details Introduction
Electronic grade trimethyl aluminum (TMA)
1. molecular formula: Al(CH3)3
2. molecular weight: 72.09
3. physical and chemical properties:
Colorless transparent liquid, melting point 15C, boiling point 127C, density 0.74 g/ml. in the emptyThe gas can instantly ignite and spontaneously ignite, and react violently with alcohol, acid and water with active hydrogen.Mixing with aliphatic hydrocarbons such as hexane and heptane and aromatic hydrocarbons such as toluene and xylene in an arbitrary ratioSoluble.
4. uses:
For PECVD or ALD deposition of Al2O in the photovoltaic field: passivation film;for the deposition of High- k material dielectric films, such as Al2Os; at the same time, TMA orMetal organic chemical vapor deposition (MOCVD) to manufacture aluminum-containing semiconductors (e. g.AIAs,AIN, AIP, AlSb, AlGaAs,AlInGaAs, AllInGaP, AIGaN,AllnGaN, AllnGaNP, etc.) are important sources of organic metals.
5. quality indicators:
6. packaging
Jar: material: stainless steel 316L, electrolytic polishing tank. Valve Type: 1/4 inch diaphragm valve.
Valve: Body Material: Stainless Steel 316L. Connection size: 1/4 inch VCR.
Specifications: 7kg,14kg,25kg,70kg,300kg
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Guizhou Wylton Jinglin Electronic Material Co., Ltd.
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Business contact:0851-84350785
Guiyang Factory:0851-84350785
Chuzhou Factory:0550-5186766
Shanghai sales office:021-62275683
E-mail:jinglin@wylton.com
Address: New Material Industrial Park, Baiyun North Road, Baiyun District, Guiyang City, Guizhou Province
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