Electronic grade triethyl borate (TEB)
It is mainly used for deposition generation of boron phosphorus silicate glass (BPSG) during wafer fabrication. It is an important electronic chemical required for the manufacture of semiconductors, discrete devices, and microelectromechanical systems (MEMS).
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Details Introduction
1. molecular formula:B(OC2H5)3
2. molecular weight:145.99
3. physical and chemical properties
Colorless transparent liquid, with mild odor, with significant thermal stability. Density 0.86 g/mL, melting point -84.8 ℃, boiling point 118 ℃. It is easy to absorb moisture and easily decompose into ethanol and boric acid when exposed to water. Flammable.
4. uses
It is mainly used for deposition generation of boron phosphorus silicate glass (BPSG) during wafer fabrication. It is an important electronic chemical required for the manufacture of semiconductors, discrete devices, and microelectromechanical systems (MEMS).
5. quality indicators
Analysis Project | Technical indicators |
Chloride, max | 50 ppb |
Moisture, max | 20 ppm |
Number of particles ≥ 0.2 µm,max | 10 p/ml |
Number of particles ≥ 0.3 µm,max | 7 p/ml |
Number of particles ≥ 0.5 µm,max | 5 p/ml |
Number of particles ≥ 1.0 µm,max | 1 p/ml |
Main content, min | 99.99% |
Chroma, max | 5 APHA a |
Purity, min | 99.9999995%（8.5N） |
6. packaging
Container: stainless steel barrel
Outer packing: stainless steel cabinet
Specifications: 5 gallons (19L)
Intention Consultation
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Guizhou Wylton Jinglin Electronic Material Co., Ltd.
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Business contact:0851-84350785
Guiyang Factory:0851-84350785
Chuzhou Factory:0550-5186766
Shanghai sales office:021-62275683
E-mail:jinglin@wylton.com
Address: New Material Industrial Park, Baiyun North Road, Baiyun District, Guiyang City, Guizhou Province
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