Electronic grade trimethyl borate (TMB)
It is mainly used for chemical vapor deposition (CVD) to generate borophosphosilicate glass (BPSG) during wafer fabrication. It is an important electronic chemical required for the manufacture of semiconductors, discrete devices, and microelectromechanical systems (MEMS).
Product number:
Classification:
Key words:
Hotline:
Details Introduction
1. molecular formula:B(OCH3)3
2. molecular weight:103.92
3. physical and chemical properties
Colorless liquid, no obvious odor, stable nature. Melting point -29 ℃, density 0.915 g/mL, boiling point 67~68 ℃. Flammable, strong reaction with oxidant. Hydrolysis of methanol and boric acid, miscible with organic solvents.
4. uses
It is mainly used for chemical vapor deposition (CVD) to generate borophosphosilicate glass (BPSG) during wafer fabrication. It is an important electronic chemical required for the manufacture of semiconductors, discrete devices, and microelectromechanical systems (MEMS).
5. quality indicators
Analysis Project | Technical indicators |
8.5N | |
Purity, min | 99.9999995% |
Cl- ，max | 50 ppb |
Moisture, max | 20 ppm |
Number of particles ≥ 0.2 µm,max | 10 p/ml |
Number of particles ≥ 0.3 µm,max | 7 p/ml |
Number of particles ≥ 0.5 µm,max | 5 p/ml |
Number of particles ≥ 1.0 µm,max | 1 p/ml |
Main content, min | 99.99 % |
Chroma, max | 5APHA |
6. packaging
Container: Stainless steel bottle
Outer packing: stainless steel cabinet
Specifications: 1.5L, 2 gallons, 5 gallons (19L), 10 gallons.
Intention Consultation
* Note: Please be sure to fill in the information accurately and keep the communication unblocked. We will get in touch with you as soon as possible.
Guizhou Wylton Jinglin Electronic Material Co., Ltd.
-
-
Business contact:0851-84350785
Guiyang Factory:0851-84350785
Chuzhou Factory:0550-5186766
Shanghai sales office:021-62275683
E-mail:jinglin@wylton.com
Address: New Material Industrial Park, Baiyun North Road, Baiyun District, Guiyang City, Guizhou Province
WeChat Scan Code Contact