Electronic grade triethyl phosphate (TEPO)
Phosphosilicate glass (PSG) and borophosphosilicate glass (BPSG) are deposited during wafer fabrication. It is an important electronic chemical required for the manufacture of semiconductors, discrete devices, and microelectromechanical systems (MEMS).
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Details Introduction
1. molecular formula:PO(OC2H5)3
2. molecular weight:182.15
3. physical and chemical properties
Colorless transparent liquid. Soluble in ethanol, soluble in ether, benzene and other organic solvents, also soluble in water. Melting point -56.4 ℃, boiling point 215 ℃, density 1.07 g/mL. It is stable under normal conditions, and reacts violently with strong alkali and strong oxidant.
4. uses
Phosphosilicate glass (PSG) and borophosphosilicate glass (BPSG) are deposited during wafer fabrication. It is an important electronic chemical required for the manufacture of semiconductors, discrete devices, and microelectromechanical systems (MEMS).
5. quality indicators
Analysis Project | Technical indicators |
Purity, min | 99.9999995%（8.5N） |
B，max | 0.5 ppb |
Cl-，max | 50 ppb |
Main content, min | 99.99% |
Moisture, max | 20 ppm |
Chroma, max | 5 APHA a |
Number of particles ≥ 0.2 µm,max | 10 p/ml |
Number of particles ≥ 0.3 µm,max | 7 p/ml |
Number of particles ≥ 0.5 µm,max | 5 p/ml |
Number of particles ≥ 1.0 µm,max | 1 p/ml |
6. packaging
Container: Stainless steel bottle
Outer packing: stainless steel cabinet
Specifications: 5 gallons (19L)
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Guizhou Wylton Jinglin Electronic Material Co., Ltd.
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Business contact:0851-84350785
Guiyang Factory:0851-84350785
Chuzhou Factory:0550-5186766
Shanghai sales office:021-62275683
E-mail:jinglin@wylton.com
Address: New Material Industrial Park, Baiyun North Road, Baiyun District, Guiyang City, Guizhou Province
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