Electronic grade trans-1, 2-dichloroethylene (DCE)
High purity chlorine source, mainly used in the wafer manufacturing process to accelerate the oxidation of silicon wafers and cleaning furnace tubes. It is an electronic chemical required for semiconductor, solar, discrete device, and microelectromechanical systems (MEMS) manufacturing. When CVD is used at temperatures below 800°C, trans-1, 2-dichloroethylene is currently known to be the best source of chlorine. DCE reacts with oxygen at high temperature and decomposes to produce HCl, CO2, etc. The generated HCl reacts with the metal atoms and is taken away by the gas to achieve the purpose of cleaning the pipeline.
Product number:
Classification:
Key words:
Hotline:
Details Introduction
1. molecular formula:C2H2Cl2
2. molecular weight:96.94
3. physical and chemical properties
Colorless liquid with slightly stimulating odor, melting point -57 ℃, boiling point 48 ℃, density 1.256 g/mL. Flammable, its vapor and air can form an explosive mixture. Can react strongly with oxidants. It shall be stored in isolation with acid and alkali.
4. uses
High purity chlorine source, mainly used in the wafer manufacturing process to accelerate the oxidation of silicon wafers and cleaning furnace tubes. It is an electronic chemical required for semiconductor, solar, discrete device, and microelectromechanical systems (MEMS) manufacturing. When CVD is used at temperatures below 800°C, trans-1, 2-dichloroethylene is currently known to be the best source of chlorine. DCE reacts with oxygen at high temperature to produce HCl, CO2Wait. The generated HCl reacts with the metal atoms and is taken away by the gas to achieve the purpose of cleaning the pipeline.
5. quality indicators
Analysis Project | Technical indicators |
7.5N | |
Purity, min | 99.999995% |
Si，max | 0.3 ppb |
B，max | 0.3 ppb |
P，max | 0.3 ppb |
Acidity, max | 0.38 ppm |
Moisture, max | 12.85 ppm |
Main content, min | 99.97% |
Particle number ≥ 0.1 μm,max | 0.97 p/ml |
Particle number ≥ 0.2 μm,max | 0.3 p/ml |
Particle number ≥ 0.5 μm,max | 0.3 p/ml |
Chroma, max | 10APHA |
6. packaging
Container: Coated high purity quartz bubbler
Outer packing: container coat thick PVC plastic bag, PE special box built-in buffer sponge, PVC inner cylinder source bottle, coat iron drum
Specifications: 500ml, 1000ml, 1500ml, 19L
Intention Consultation
* Note: Please be sure to fill in the information accurately and keep the communication unblocked. We will get in touch with you as soon as possible.
Guizhou Wylton Jinglin Electronic Material Co., Ltd.
-
-
Business contact:0851-84350785
Guiyang Factory:0851-84350785
Chuzhou Factory:0550-5186766
Shanghai sales office:021-62275683
E-mail:jinglin@wylton.com
Address: New Material Industrial Park, Baiyun North Road, Baiyun District, Guiyang City, Guizhou Province
WeChat Scan Code Contact