PRODUCT
Electronic grade Triethyl phosphate(TEPO)
Electronic grade Triethyl phosphate(TEPO)
Molecular formula: PO(OC2Hs)s
Relative molecular mass: 182.15
Chemical & Physical Properties:
Colorless transparent liquid. Soluble in ethanol, ether, benzene and other organic solvents, but also soluble in water. Melting point: -56.4 C, boil-ing point : 215 °C, density 1.07kg / L. Stable under normal conditions,Reacts violently in case of alkali, strong oxidants.
Applications:
Mainly used for the deposition process in the production of wafer fabri-cation process to produce phosphorus silicon glass ( PSG) and boro-phosphosilicate glass (BPSG). Important electronic chemicals for the manufacture of semiconductor, discrete devices, micro- -electrome-chanical systems (MEMS).
Specification:
Packaging specification:
Container: stainless steel bottle
packing: stainless steel locker
Specification: 5 gallons (19L)
贵州威顿晶磷电子材料股份有限公司
Guizhou Wylton Jinglin Electronic Material Co., Ltd.
Product
Electronic materials
Contact us
tel：0851-84350785
E-mail：jinglin@wylton.com
Address: New Material Industrial Park of Baiyun District, Guiyang City, Guizhou Province, China.
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