PRODUCT
Electronic grade Trimethyl phosphate (TMPO)
Electronic grade Trimethyl phosphate (TMPO)
Molecular formula: PO(OCH3)3
Relative molecular mass: 140.08
Chemical & Physical Properties:
Colorless liquid, fruit flavor, melting point: -46 C, boiling point: 197 °C,density :1.20 g / ml. Flammable, soluble in water and ether, insoluble in ethanol.
Applications:
Mainly used for the deposition process in the production of wafer fab-rication process to produce phosphorus silicon glass ( PSG) and bo-rophosphosilicate glass (BPSG). Important electronic chemicals for the manufacture of semiconductor, discrete devices, micro- -electro-mechanical systems (MEMS).
Specification:
Packaging specification:
Container: stainless steel bottle
packing: stainless steel locker
Specification: 5 gallons (19L)
贵州威顿晶磷电子材料股份有限公司
Guizhou Wylton Jinglin Electronic Material Co., Ltd.
Product
Electronic materials
Contact us
tel：0851-84350785
E-mail：jinglin@wylton.com
Address: New Material Industrial Park of Baiyun District, Guiyang City, Guizhou Province, China.
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