Electronic Grade Trimethyl Phosphate (TMPO)
It is mainly used to deposit phosphosilicate glass (PSG) and borophosphosilicate glass (BPSG) during wafer manufacturing. It is an important electronic chemical required for the manufacture of semiconductors, discrete devices, and microelectromechanical systems (MEMS).
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Details Introduction
1. molecular formula:PO(OCH)3)3
2. molecular weight:140.08
3. physical and chemical properties
Colorless liquid, fruity, melting point -46 ℃, boiling point 197 ℃, density 1.20 g/mL. Soluble in water and ether, insoluble in ethanol. Combustible in case of open flame and high heat, toxic fumes of phosphorus oxide produced by thermal decomposition, and violent reaction in case of strong alkali and strong oxidant.
4. uses
It is mainly used to deposit phosphosilicate glass (PSG) and borophosphosilicate glass (BPSG) during wafer manufacturing. It is an important electronic chemical required for the manufacture of semiconductors, discrete devices, and microelectromechanical systems (MEMS).
5. quality indicators
Analysis Project | Technical indicators |
Purity, min | 99.9999995%（8.5N） |
Chloride, max | 50 ppb |
Moisture, max | 20 ppm |
Number of particles ≥ 0.3 µm,max | 7 p/ml |
Number of particles ≥ 0.5 µm,max | 5 p/ml |
Main content, min | 99.99% |
Chroma, max | 5APHA |
6. packaging
Container: Stainless steel bottle
Outer packing: stainless steel cabinet
Specifications: 5 gallons (19L)
Intention Consultation
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Guizhou Wylton Jinglin Electronic Material Co., Ltd.
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Business contact:0851-84350785
Guiyang Factory:0851-84350785
Chuzhou Factory:0550-5186766
Shanghai sales office:021-62275683
E-mail:jinglin@wylton.com
Address: New Material Industrial Park, Baiyun North Road, Baiyun District, Guiyang City, Guizhou Province
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